Ultrafast laser micromachining of 3C-SiC thin films for MEMS device fabrication

Ben Pecholt; Monica Vendan; Yuanyuan Dong; Pal Molian

doi:10.1007/s00170-007-1223-5

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Ultrafast laser micromachining of 3C-SiC thin films for MEMS device fabrication

Ben Pecholt Monica Vendan Yuanyuan Dong Pal Molian

Year: 2007 Journal: The International Journal of Advanced Manufacturing Technology Vol: 39 (3-4)Pages: 239-250 Publisher: Springer Science+Business Media

DOI: 10.1007/s00170-007-1223-5

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Keywords:

Materials science Surface micromachining Laser Optoelectronics Ultrashort pulse Laser ablation Microelectromechanical systems Femtosecond Excimer laser Vaporization Fabrication Optics Chemistry

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Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Ultrafast laser micromachining of 3C-SiC thin films for MEMS device fabrication

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