Femtosecond pulsed laser ablation and patterning of 3C-SiC films on Si substrates for MEMS fabrication

Yuanyuan Dong

doi:10.31274/rtd-180813-35

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Femtosecond pulsed laser ablation and patterning of 3C-SiC films on Si substrates for MEMS fabrication

Yuanyuan Dong

Year: 2004

DOI: 10.31274/rtd-180813-35

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Keywords:

Fabrication Materials science Microelectromechanical systems Femtosecond Ablation Laser ablation Optoelectronics Laser Nanotechnology Optics Engineering

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Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Silicon Nanostructures and Photoluminescence

Physical Sciences → Materials Science → Materials Chemistry

Femtosecond pulsed laser ablation and patterning of 3C-SiC films on Si substrates for MEMS fabrication

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