Mechanical Properties of 3C-SiC Films for MEMS Applications

Jayadeep Deva Reddy; Alex A. Volinsky; Christopher L. Frewin; Chris Locke; Stephen E. Saddow

doi:10.1557/proc-1049-aa03-06

ScienceGate Book Chapters

JOURNAL ARTICLE

Mechanical Properties of 3C-SiC Films for MEMS Applications

Jayadeep Deva Reddy Alex A. Volinsky Christopher L. Frewin Chris Locke Stephen E. Saddow

Year: 2007 Journal: MRS Proceedings Vol: 1049 Publisher: Cambridge University Press

DOI: 10.1557/proc-1049-aa03-06

Get Full-Text PDF Get Analytical Report

Keywords:

Materials science Nanoindentation Crystallite Elastic modulus Composite material Fracture toughness Microelectromechanical systems Silicon carbide Indentation Thin film Single crystal Modulus Crystallography Nanotechnology Metallurgy

Metrics

Cited By

2.69

FWCI (Field Weighted Citation Impact)

Refs

0.89

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Citation History

Topics

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Advanced ceramic materials synthesis

Physical Sciences → Materials Science → Ceramics and Composites

Mechanical Properties of 3C-SiC Films for MEMS Applications

Metrics

Citation History

Topics

Related Documents

3C-SiC Films on Si for MEMS Applications: Mechanical Properties

Growth and Characterization of 3C-SiC Films for Micro Electro Mechanical Systems (MEMS) Applications

Mechanical Properties and Residual Stress of Thin 3C-SiC(100) Films Determined Using MEMS Structures

Mechanical Properties and Residual Stress of Thin 3C-SiC(111) Films Determined Using MEMS Structures

Novel 3C-SiC Microstructure for MEMS Applications