JOURNAL ARTICLE

Laser-induced trench etching of GaAs in aqueous KOH solution

Cheon LeeMikio TakaiToshiro YadaKazuo KatoSusumu Namba

Year: 1990 Journal:   Applied Physics A Vol: 51 (4)Pages: 340-343   Publisher: Springer Science+Business Media
Keywords:
Materials science Etching (microfabrication) Trench Microprobe Raman spectroscopy Laser Auger electron spectroscopy Aqueous solution Photoluminescence Irradiation Dry etching Optoelectronics Scanning electron microscope Reactive-ion etching Raman scattering Isotropic etching Analytical Chemistry (journal) Optics Nanotechnology Composite material Mineralogy Chemistry

Metrics

10
Cited By
1.42
FWCI (Field Weighted Citation Impact)
17
Refs
0.83
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Laser Material Processing Techniques
Physical Sciences →  Engineering →  Computational Mechanics
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Semiconductor Quantum Structures and Devices
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics

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