Laser-stimulated etching of n-GaAs in aqueous solutions

Václav Švorčı́k; V. Rybka

doi:10.1016/0167-577x(89)90122-5

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Laser-stimulated etching of n-GaAs in aqueous solutions

Václav Švorčı́k V. Rybka

Year: 1989 Journal: Materials Letters Vol: 9 (1)Pages: 14-16 Publisher: Elsevier BV

DOI: 10.1016/0167-577x(89)90122-5

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Keywords:

Materials science Etching (microfabrication) Laser Aqueous solution Semiconductor Ion Isotropic etching Optoelectronics Reactive-ion etching Inorganic chemistry Nanotechnology Optics Physical chemistry Chemistry Layer (electronics) Organic chemistry

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Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Laser Design and Applications

Physical Sciences → Engineering → Electrical and Electronic Engineering

Semiconductor Quantum Structures and Devices

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Laser-stimulated etching of n-GaAs in aqueous solutions

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