JOURNAL ARTICLE
Laser-stimulated etching of n-type semiconductors
Václav Švorčı́kV. RybkaV. Myslík
Year: 1988 Journal: Chemical Physics Letters Vol: 144 (5-6)Pages: 548-551 Publisher: Elsevier BV
Keywords:
Oxidizing agent Etching (microfabrication) Semiconductor Aqueous solution Laser Photoelectrochemistry Chemistry Analytical Chemistry (journal) Materials science Photochemistry Inorganic chemistry Optoelectronics Electrochemistry Optics Nanotechnology Electrode Physical chemistry Chromatography Organic chemistry
Metrics
9
Cited By
2.97
FWCI (Field Weighted Citation Impact)
7
Refs
0.91
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Topics
Laser Material Processing Techniques
Physical Sciences → Engineering → Computational Mechanics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Silicon Nanostructures and Photoluminescence
Physical Sciences → Materials Science → Materials Chemistry
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