Thermal nanoimprint fabrication of chalcogenide glass waveguide resonators

Yi Zou; Hongtao Lin; Lan Li; Sylvain Danto; J. David Musgraves; Kathleen Richardson; Juejun Hu

doi:10.1364/cleo_si.2013.cth1j.5

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JOURNAL ARTICLE

Thermal nanoimprint fabrication of chalcogenide glass waveguide resonators

Yi Zou Hongtao Lin Lan Li Sylvain Danto J. David Musgraves Kathleen Richardson Juejun Hu

Year: 2013 Vol: 37 Pages: CTh1J.5-CTh1J.5

DOI: 10.1364/cleo_si.2013.cth1j.5

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Abstract

We demonstrated thermal nanoimprint fabrication of low loss waveguides and micro-ring resonators in thermally evaporated and solution processed chalcogenide glass films. A high micro-ring quality factor of 75,000 is achieved at 1550 nm wavelength.

Keywords:

Materials science Fabrication Resonator Chalcogenide Nanoimprint lithography Chalcogenide glass Optoelectronics Thermal Wavelength Q factor Waveguide

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Nanofabrication and Lithography Techniques

Physical Sciences → Engineering → Biomedical Engineering

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Phase-change materials and chalcogenides

Physical Sciences → Materials Science → Materials Chemistry

Thermal nanoimprint fabrication of chalcogenide glass waveguide resonators

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