Fabrication of waveguide-integrated suspended chalcogenide glass microdisk resonator
Ying ZhuLei WanZelin YangZhenshi ChenJingcui SongDi XiaPingyang ZengMingjie ZhangBin ZhangZhaohui Li
Abstract
We have demonstrated a waveguide-integrated suspended Geii.5As24Se64.5 microdisk with intrinsic quality factor of 1*10 6 , which is the highest figure, to the best of our knowledge, with respect to reported thus far in suspended chalcogenide resonators.
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