Fabrication of low loss Chalcogenide glass waveguide via thermal nanoimprint lithography

Ting Han; Steve Madden; Douglas Bulla; Barry Luther‐Davies

doi:10.1109/commad.2010.5699775

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JOURNAL ARTICLE

Fabrication of low loss Chalcogenide glass waveguide via thermal nanoimprint lithography

Ting Han Steve Madden Douglas Bulla Barry Luther‐Davies

Year: 2010 Vol: 104 Pages: 53-54

DOI: 10.1109/commad.2010.5699775

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Abstract

We report the fabrication of Chalcogenide glass rib waveguides by thermal nano-imprint. Waveguides 2-4μm wide and 1μm high were fabricated with optical losses of 0.26dB/cm and 0.27dB/cm for TM and TE polarizations at 1550nm.

Keywords:

Nanoimprint lithography Fabrication Materials science Chalcogenide Chalcogenide glass Optoelectronics Thermal Waveguide Lithography Optics Integrated optics

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Nanofabrication and Lithography Techniques

Physical Sciences → Engineering → Biomedical Engineering

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Nonlinear Optical Materials Studies

Physical Sciences → Engineering → Biomedical Engineering

Fabrication of low loss Chalcogenide glass waveguide via thermal nanoimprint lithography

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