Low Loss Chalcogenide Glass Waveguides Fabricated By Thermal Nanoimprint Lithography

Steve Madden; Ting Han; Douglas Bulla; Barry Luther‐Davies

doi:10.1364/ofc.2010.omh3

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JOURNAL ARTICLE

Low Loss Chalcogenide Glass Waveguides Fabricated By Thermal Nanoimprint Lithography

Steve Madden Ting Han Douglas Bulla Barry Luther‐Davies

Year: 2010 Journal: Optical Fiber Communication Conference Pages: OMH3-OMH3

DOI: 10.1364/ofc.2010.omh3

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Abstract

Low loss thermally nanoimprinted chalcogenide waveguides are demonstrated for the first time, uniquely using a soft PDMS stamp. Losses of 0.24dB/cm at 1550nm limited by Rayleigh scattering were achieved and embossing of As2S3 also demonstrated.

Keywords:

Nanoimprint lithography Materials science Chalcogenide Embossing Chalcogenide glass Lithography Rayleigh scattering Optoelectronics Thermal Optics Soft lithography Composite material Fabrication

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Nanofabrication and Lithography Techniques

Physical Sciences → Engineering → Biomedical Engineering

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Nonlinear Optical Materials Studies

Physical Sciences → Engineering → Biomedical Engineering

Low Loss Chalcogenide Glass Waveguides Fabricated By Thermal Nanoimprint Lithography

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