Low loss Chalcogenide glass waveguides by thermal nano-imprint lithography

Ting Han; Steve Madden; Douglas Bulla; Barry Luther‐Davies

doi:10.1364/oe.18.019286

ScienceGate Book Chapters

JOURNAL ARTICLE

Low loss Chalcogenide glass waveguides by thermal nano-imprint lithography

Ting Han Steve Madden Douglas Bulla Barry Luther‐Davies

Year: 2010 Journal: Optics Express Vol: 18 (18)Pages: 19286-19286 Publisher: Optica Publishing Group

DOI: 10.1364/oe.18.019286

Get Full-Text PDF Get Analytical Report

Abstract

We report the fabrication of low loss rib waveguides from chalcogenide glass films by thermal nano-imprint using a soft stamp. Waveguides 2-4 µm wide and 1 µm high were fabricated with extremely smooth sidewalls and optical losses limited by Rayleigh scattering to values of 0.26 dB/cm for the TM and 0.27 dB/cm for TE polarizations at 1550 nm.

Keywords:

Chalcogenide Materials science Optics Chalcogenide glass Lithography Nano- Fabrication Rayleigh scattering Scattering Thermal Optoelectronics Composite material

Metrics

Cited By

5.15

FWCI (Field Weighted Citation Impact)

Refs

0.95

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Citation History

Topics

Nanofabrication and Lithography Techniques

Physical Sciences → Engineering → Biomedical Engineering

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Semiconductor Lasers and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Low loss Chalcogenide glass waveguides by thermal nano-imprint lithography

Abstract

Metrics

Citation History

Topics

Related Documents

Low Loss Chalcogenide Glass Waveguides Fabricated By Thermal Nanoimprint Lithography

Nano-Imprint Lithography of Titanium Dioxide Waveguides

Soft imprint lithography of a bulk chalcogenide glass

Fabrication of low loss Chalcogenide glass waveguide via thermal nanoimprint lithography

Optical loss reduction in HIC chalcogenide glass waveguides via thermal reflow