Soft imprint lithography of a bulk chalcogenide glass

Abstract

We report on large-surface-area micro-patterning of a bulk chalcogenide glass by a PDMS soft mould. Micrometre-scale (width ~4μm and depth ~0.8 μm) test patterns such as ribs, channels and a lens array are successfully imprinted into the surface of high refractive index As3S7 bulk glass at 225°C without any applied external pressure. The mean-square roughness of the patterned glass surface is in the range 3 – 10 nm. Soft imprinting of bulk chalcogenide glass is an efficient method for reliable fabrication of optical and photonic devices.