Hard and superhard nanocomposite Al–Cu–N films prepared by magnetron sputtering

J. Musil; H. Hrubý; P. Zeman; H. Zeman; R. Čerstvý; P.H. Mayrhofer; Christian Mitterer

doi:10.1016/s0257-8972(01)01200-2

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Hard and superhard nanocomposite Al–Cu–N films prepared by magnetron sputtering

J. Musil H. Hrubý P. Zeman H. Zeman R. Čerstvý P.H. Mayrhofer Christian Mitterer

Year: 2001 Journal: Surface and Coatings Technology Vol: 142-144 Pages: 603-609 Publisher: Elsevier BV

DOI: 10.1016/s0257-8972(01)01200-2

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Keywords:

Materials science Indentation hardness Nanocomposite Sputter deposition Cavity magnetron Composite material Copper Sputtering Aluminium Substrate (aquarium) Metallurgy Elastic modulus Microstructure Thin film Nanotechnology

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Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Advanced ceramic materials synthesis

Physical Sciences → Materials Science → Ceramics and Composites

Boron and Carbon Nanomaterials Research

Physical Sciences → Materials Science → Materials Chemistry

Hard and superhard nanocomposite Al–Cu–N films prepared by magnetron sputtering

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