JOURNAL ARTICLE

Superhard nanocomposite Ti1−Al N films prepared by magnetron sputtering

J. MusilH. Hrubý

Year: 2000 Journal:   Thin Solid Films Vol: 365 (1)Pages: 104-109   Publisher: Elsevier BV
Keywords:
Materials science Nanocomposite Amorphous solid Sputter deposition Substrate (aquarium) Sputtering Indentation hardness Cavity magnetron Thin film Composite material Analytical Chemistry (journal) Phase (matter) Metallurgy Nanotechnology Crystallography Microstructure Chemistry

Metrics

256
Cited By
27.79
FWCI (Field Weighted Citation Impact)
15
Refs
1.00
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
Advanced ceramic materials synthesis
Physical Sciences →  Materials Science →  Ceramics and Composites
MXene and MAX Phase Materials
Physical Sciences →  Materials Science →  Materials Chemistry

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