JOURNAL ARTICLE

Structural analysis of Ti1−xSixNy nanocomposite films prepared by reactive magnetron sputtering

F. VazL. ReboutaBernardo AlmeidaP. GoudeauJ. PacaudJ.P. RivièreJ. B. Sousa

Year: 1999 Journal:   Surface and Coatings Technology Vol: 120-121 Pages: 166-172   Publisher: Elsevier BV
Keywords:
Tin Materials science Lattice constant Sputtering Amorphous solid Grain size Analytical Chemistry (journal) Sputter deposition Nitride Crystal structure Diffraction Thin film Crystallography Metallurgy Composite material Nanotechnology Optics Layer (electronics)

Metrics

103
Cited By
8.39
FWCI (Field Weighted Citation Impact)
28
Refs
0.98
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry
GaN-based semiconductor devices and materials
Physical Sciences →  Physics and Astronomy →  Condensed Matter Physics

Related Documents

JOURNAL ARTICLE

Superhard nanocomposite Ti1−Al N films prepared by magnetron sputtering

J. MusilH. Hrubý

Journal:   Thin Solid Films Year: 2000 Vol: 365 (1)Pages: 104-109
JOURNAL ARTICLE

Characterisation of Ti1−xSixNy nanocomposite films

F. VazL. ReboutaP. GoudeauJ. PacaudH. GaremJ.P. RivièreA. CavaleiroE. Alves

Journal:   Surface and Coatings Technology Year: 2000 Vol: 133-134 Pages: 307-313
BOOK-CHAPTER

Hard Nanocomposite Films Prepared by Reactive Magnetron Sputtering

J. Musil

Kluwer Academic Publishers eBooks Year: 2006 Pages: 43-56
JOURNAL ARTICLE

Physical, structural and mechanical characterization of Ti1−xSixNy films

F. VazL. ReboutaAna Sofia RamosM.F. da SilvaJ.C. Soares

Journal:   Surface and Coatings Technology Year: 1998 Vol: 108-109 Pages: 236-240
BOOK-CHAPTER

Physical and Mechanical Properties of Hard Nanocomposite Films Prepared by Reactive Magnetron Sputtering

J. Musil

Nanostructure science and technology Year: 2006 Pages: 407-463
© 2026 ScienceGate Book Chapters — All rights reserved.