Structural analysis of Ti1−xSixNy nanocomposite films prepared by reactive magnetron sputtering

F. Vaz; L. Rebouta; Bernardo Almeida; P. Goudeau; J. Pacaud; J.P. Rivière; J. B. Sousa

doi:10.1016/s0257-8972(99)00450-8

ScienceGate Book Chapters

JOURNAL ARTICLE

Structural analysis of Ti1−xSixNy nanocomposite films prepared by reactive magnetron sputtering

F. Vaz L. Rebouta Bernardo Almeida P. Goudeau J. Pacaud J.P. Rivière J. B. Sousa

Year: 1999 Journal: Surface and Coatings Technology Vol: 120-121 Pages: 166-172 Publisher: Elsevier BV

DOI: 10.1016/s0257-8972(99)00450-8

Get Full-Text PDF Get Analytical Report

Keywords:

Tin Materials science Lattice constant Sputtering Amorphous solid Grain size Analytical Chemistry (journal) Sputter deposition Nitride Crystal structure Diffraction Thin film Crystallography Metallurgy Composite material Nanotechnology Optics Layer (electronics)

Metrics

103

Cited By

8.39

FWCI (Field Weighted Citation Impact)

Refs

0.98

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Citation History

Topics

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

GaN-based semiconductor devices and materials

Physical Sciences → Physics and Astronomy → Condensed Matter Physics

Structural analysis of Ti1−xSixNy nanocomposite films prepared by reactive magnetron sputtering

Metrics

Citation History

Topics

Related Documents

Superhard nanocomposite Ti1−Al N films prepared by magnetron sputtering

Characterisation of Ti1−xSixNy nanocomposite films

Hard Nanocomposite Films Prepared by Reactive Magnetron Sputtering

Physical, structural and mechanical characterization of Ti1−xSixNy films

Physical and Mechanical Properties of Hard Nanocomposite Films Prepared by Reactive Magnetron Sputtering