A dome-shaped cavity type microwave plasma chemical vapor deposition reactor for diamond films deposition

Jingjie Su; Y.F. Li; Minghui Ding; Xian‐hua Li; Y.Q. Liu; Gang Wang; Weizhong Tang

doi:10.1016/j.vacuum.2014.04.002

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A dome-shaped cavity type microwave plasma chemical vapor deposition reactor for diamond films deposition

Jingjie Su Y.F. Li Minghui Ding Xian‐hua Li Y.Q. Liu Gang Wang Weizhong Tang

Year: 2014 Journal: Vacuum Vol: 107 Pages: 51-55 Publisher: Elsevier BV

DOI: 10.1016/j.vacuum.2014.04.002

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Keywords:

Chemical vapor deposition Diamond Microwave Materials science Deposition (geology) Optoelectronics Ion source Plasma-enhanced chemical vapor deposition Plasma Silicon Nuclear engineering Composite material Physics Nuclear physics Geology Engineering

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0.82

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Topics

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

A dome-shaped cavity type microwave plasma chemical vapor deposition reactor for diamond films deposition

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Citation History

Topics

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