JOURNAL ARTICLE

A dome-shaped cavity type microwave plasma chemical vapor deposition reactor for diamond films deposition

Keywords:
Chemical vapor deposition Diamond Microwave Materials science Deposition (geology) Optoelectronics Ion source Plasma-enhanced chemical vapor deposition Plasma Silicon Nuclear engineering Composite material Physics Nuclear physics Geology Engineering

Metrics

34
Cited By
1.52
FWCI (Field Weighted Citation Impact)
25
Refs
0.82
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry
Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
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