JOURNAL ARTICLE
Revisiting the gas flow rate effect on diamond films deposition with a new dome-shaped cavity type microwave plasma CVD reactor
Jingjie SuY. LiYazheng LiuMinghui DingWei Tang
Year: 2016 Journal: Diamond and Related Materials Vol: 73 Pages: 99-104 Publisher: Elsevier BV
Keywords:
Dome (geology) Plasma Chemical vapor deposition Microwave Deposition (geology) Diamond Volumetric flow rate Materials science Flow (mathematics) Ion source Chemistry Analytical Chemistry (journal) Nanotechnology Composite material Geology Physics Mechanics Nuclear physics Environmental chemistry
Metrics
10
Cited By
0.32
FWCI (Field Weighted Citation Impact)
35
Refs
0.61
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Diamond and Carbon-based Materials Research
Physical Sciences → Materials Science → Materials Chemistry
Metal and Thin Film Mechanics
Physical Sciences → Engineering → Mechanics of Materials
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
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