Femtosecond three dimensional holographic lithography using CGH displayed on SLM

Abstract

Holographic three dimensional photolithography was demonstrated in this paper. The femtosecond laser pulse duration provide higher resolution and more effective for single shot pattern transfer, due to larger peak powers that generate larger photonic concentration at beam focus. A computer generated hologram (CGH) created with optimal-rotation-angle (ORA) method will increase the uniformity of the diffraction peaks. To verify this method, simulation is conducted using MATLAB.