Three-dimensional SiO2 surface structures fabricated using femtosecond laser lithography

Mizue Mizoshiri; Hiroaki Nishiyama; Junji Nishii; Yoshinori Hirata

doi:10.1007/s00339-009-5446-1

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Three-dimensional SiO2 surface structures fabricated using femtosecond laser lithography

Mizue Mizoshiri Hiroaki Nishiyama Junji Nishii Yoshinori Hirata

Year: 2009 Journal: Applied Physics A Vol: 98 (1)Pages: 171-177 Publisher: Springer Science+Business Media

DOI: 10.1007/s00339-009-5446-1

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Keywords:

Femtosecond Lithography Materials science Laser Surface (topology) Optics Maskless lithography Optoelectronics Nanotechnology Electron-beam lithography Resist Physics Geometry

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Nonlinear Optical Materials Studies

Physical Sciences → Engineering → Biomedical Engineering

Nanofabrication and Lithography Techniques

Physical Sciences → Engineering → Biomedical Engineering

Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Three-dimensional SiO2 surface structures fabricated using femtosecond laser lithography

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