Three dimensional (3D) parallel processing holographic lithography using femtosecond laser pulse

Abstract

Holographic three dimensional (3D) parallel lithography using femtosecond laser pulse were demonstrated in this paper. A computer generated hologram (CGH) that calculated using kinoform algorithm with optimal rotation angle (ORA) method were used in order to increase the uniformity of the diffraction peaks so that the resolution of the 3D image also improved. The use of femtosecond pulse duration of a Ti:sapphire laser improved the holograms resolution due to larger peak powers that generate larger photonics concentrations at the beam focus and improve single-shot processing. A digital instrument nanoscope was used to verify the result and scanning electron microscopy (SEM) will be used to observe the detail result.