High frequency vertical InAs nanowire MOSFETs integrated on Si substrates

Abstract

Abstract RF and DC characterization of vertical InAs nanowire MOSFET on Si substrates are presented. Nanowire arrays are epitaxially integrated on Si substrates by use of a thin InAs buffer layer. For device fabrication, high‐k HfO 2 gate dielectric and wrap‐gates are used. Post‐deposition annealing of the high‐k is evaluated by comparing one annealed and one not‐annealed sample. The annealed sample show better DC characteristics in terms of transconductance, g m = 155 mS/mm, and on‐current, I on = 550 mA/mm. Box plots of on‐current, on‐resistance and transconductance for all 190‐nanowire‐array transistors on the annealed sample suggest that the electrical properties of the nanowires are preserved when scaling the nanowire diameter. Finally, high frequency characterisation yields a unity current gain cut‐off frequency of f t = 9.3 GHz for the annealed sample and f t = 2.0 GHz for the not‐annealed sample. (© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)