Mn-doped ZnO transparent conducting films deposited by DC magnetron sputtering

Hua-fu Zhang; Ruijin Liu; Liu Han-fa; Chengxin Lei; Dong-tai Feng; Chang-Kun Yuan

doi:10.1016/j.matlet.2009.12.015

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Mn-doped ZnO transparent conducting films deposited by DC magnetron sputtering

Hua-fu Zhang Ruijin Liu Liu Han-fa Chengxin Lei Dong-tai Feng Chang-Kun Yuan

Year: 2009 Journal: Materials Letters Vol: 64 (5)Pages: 605-607 Publisher: Elsevier BV

DOI: 10.1016/j.matlet.2009.12.015

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Keywords:

Materials science Doping Sputter deposition Optoelectronics Sputtering High-power impulse magnetron sputtering Cavity magnetron Thin film Engineering physics Nanotechnology

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ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Copper-based nanomaterials and applications

Physical Sciences → Materials Science → Materials Chemistry

Mn-doped ZnO transparent conducting films deposited by DC magnetron sputtering

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