Transparent conducting molybdenum-doped zinc oxide films deposited by RF magnetron sputtering

Xianwu Xiu; Zhiyong Pang; Maoshui Lv; Ying Dai; Lina Ye; Shenghao Han

doi:10.1016/j.apsusc.2006.07.024

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Transparent conducting molybdenum-doped zinc oxide films deposited by RF magnetron sputtering

Xianwu Xiu Zhiyong Pang Maoshui Lv Ying Dai Lina Ye Shenghao Han

Year: 2006 Journal: Applied Surface Science Vol: 253 (6)Pages: 3345-3348 Publisher: Elsevier BV

DOI: 10.1016/j.apsusc.2006.07.024

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Keywords:

Materials science Electrical resistivity and conductivity Transmittance Crystallinity Doping Sputtering Sputter deposition Molybdenum Cavity magnetron Optoelectronics Oxide Transparent conducting film Zinc Thin film Analytical Chemistry (journal) Composite material Mineralogy Metallurgy Nanotechnology Chemistry

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ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Transition Metal Oxide Nanomaterials

Physical Sciences → Materials Science → Polymers and Plastics

Transparent conducting molybdenum-doped zinc oxide films deposited by RF magnetron sputtering

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