Physical properties of transparent conducting indium doped zinc oxide thin films deposited by pulsed DC magnetron sputtering

Young Ran Park; Donggeun Jung; Ki-Chul Kim; Su Jeong Suh; Tae Seok Park; Young Sung Kim

doi:10.1007/s10832-008-9530-2

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Physical properties of transparent conducting indium doped zinc oxide thin films deposited by pulsed DC magnetron sputtering

Young Ran Park Donggeun Jung Ki-Chul Kim Su Jeong Suh Tae Seok Park Young Sung Kim

Year: 2008 Journal: Journal of Electroceramics Vol: 23 (2-4)Pages: 536-541 Publisher: Springer Science+Business Media

DOI: 10.1007/s10832-008-9530-2

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Keywords:

Materials science Thin film Optoelectronics Sputter deposition Dopant Doping Substrate (aquarium) Raman spectroscopy Cavity magnetron Sputtering Optics Nanotechnology

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ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Copper-based nanomaterials and applications

Physical Sciences → Materials Science → Materials Chemistry

Physical properties of transparent conducting indium doped zinc oxide thin films deposited by pulsed DC magnetron sputtering

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