Effect of Composition in Transparent Conducting Indium Zinc Tin Oxide Thin Films Deposited by RF Magnetron Sputtering

Damisih Damisih; Hong Chan; Ferdyano Finanda; Jeong-Joo Kim; Hee Young Lee

doi:10.1166/jno.2012.1388

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Effect of Composition in Transparent Conducting Indium Zinc Tin Oxide Thin Films Deposited by RF Magnetron Sputtering

Damisih Damisih Hong Chan Ferdyano Finanda Jeong-Joo Kim Hee Young Lee

Year: 2012 Journal: Journal of Nanoelectronics and Optoelectronics Vol: 7 (5)Pages: 483-487 Publisher: American Scientific Publishers

DOI: 10.1166/jno.2012.1388

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Keywords:

Materials science Indium tin oxide Indium Sputter deposition Tin Zinc Sputtering Thin film Optoelectronics Cavity magnetron Metallurgy Nanotechnology

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ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Effect of Composition in Transparent Conducting Indium Zinc Tin Oxide Thin Films Deposited by RF Magnetron Sputtering

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