JOURNAL ARTICLE

Plasma deposition of hydrogenated diamond-like carbon films from CH4-Ar mixtures

G. CicalaP. BrunoAurora M. LosaccoG. Mattei

Year: 2004 Journal:   Surface and Coatings Technology Vol: 180-181 Pages: 222-226   Publisher: Elsevier BV
Keywords:
Materials science Sputtering Argon Plasma Methane Etching (microfabrication) Analytical Chemistry (journal) Carbon fibers Sputter deposition Diamond Hydrogen Diamond-like carbon Deposition (geology) Chemical engineering Thin film Nanotechnology Metallurgy Composite material Chemistry Layer (electronics) Composite number Organic chemistry

Metrics

31
Cited By
1.81
FWCI (Field Weighted Citation Impact)
15
Refs
0.84
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry
Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
Carbon Nanotubes in Composites
Physical Sciences →  Materials Science →  Materials Chemistry

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