Plasma deposition of hydrogenated diamond-like carbon films from CH4-Ar mixtures

G. Cicala; P. Bruno; Aurora M. Losacco; G. Mattei

doi:10.1016/j.surfcoat.2003.10.044

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Plasma deposition of hydrogenated diamond-like carbon films from CH4-Ar mixtures

G. Cicala P. Bruno Aurora M. Losacco G. Mattei

Year: 2004 Journal: Surface and Coatings Technology Vol: 180-181 Pages: 222-226 Publisher: Elsevier BV

DOI: 10.1016/j.surfcoat.2003.10.044

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Keywords:

Materials science Sputtering Argon Plasma Methane Etching (microfabrication) Analytical Chemistry (journal) Carbon fibers Sputter deposition Diamond Hydrogen Diamond-like carbon Deposition (geology) Chemical engineering Thin film Nanotechnology Metallurgy Composite material Chemistry Layer (electronics) Composite number Organic chemistry

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Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Carbon Nanotubes in Composites

Physical Sciences → Materials Science → Materials Chemistry

Plasma deposition of hydrogenated diamond-like carbon films from CH4-Ar mixtures

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