Fast deposition of diamond-like hydrogenated carbon films

Teodor Zaharia; JL Sullivan; S.O. Saied; R.C.M. Bosch; M.D. Bijker

doi:10.1016/j.diamond.2006.11.055

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Fast deposition of diamond-like hydrogenated carbon films

Teodor Zaharia JL Sullivan S.O. Saied R.C.M. Bosch M.D. Bijker

Year: 2007 Journal: Diamond and Related Materials Vol: 16 (3)Pages: 623-629 Publisher: Elsevier BV

DOI: 10.1016/j.diamond.2006.11.055

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Keywords:

Carbon fibers Carbon film Chemical vapor deposition Deposition (geology) Materials science Diamond Nanotechnology Thin film Chemical engineering Optoelectronics Composite material Composite number Geology Engineering

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Topics

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Fast deposition of diamond-like hydrogenated carbon films

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