JOURNAL ARTICLE

Deposition of hydrogenated amorphous carbon films from CH4/Ar plasmas: Ar dilution effects

Luca ValentiniJ. M. KennyG. MariottoPaolo Tosi

Year: 2001 Journal:   Journal of Materials Science Vol: 36 (21)Pages: 5295-5300   Publisher: Springer Science+Business Media
Keywords:
Materials science Raman spectroscopy Glow discharge Amorphous solid Analytical Chemistry (journal) Amorphous carbon Argon Carbon film Chemical composition Carbon fibers Plasma Chemical engineering Thin film Composite material Nanotechnology Crystallography Optics Composite number Organic chemistry Chemistry

Metrics

14
Cited By
0.25
FWCI (Field Weighted Citation Impact)
12
Refs
0.49
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry
Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
Ion-surface interactions and analysis
Physical Sciences →  Engineering →  Computational Mechanics
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