Single-Source Precursors to Titanium Nitride Thin Films

Charles H. Winter; T. Suren Lewkebandara; Philip H. Sheridan; James W. Proscia

doi:10.1557/proc-282-293

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Single-Source Precursors to Titanium Nitride Thin Films

Charles H. Winter T. Suren Lewkebandara Philip H. Sheridan James W. Proscia

Year: 1992 Journal: MRS Proceedings Vol: 282 Publisher: Cambridge University Press

DOI: 10.1557/proc-282-293

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Keywords:

Titanium tetrachloride Materials science Titanium X-ray photoelectron spectroscopy Substrate (aquarium) Nitride Chlorine Thin film Titanium nitride Ammonia Nitrogen Inorganic chemistry Silicon Chemical engineering Organic chemistry Nanotechnology Metallurgy Chemistry

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Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

GaN-based semiconductor devices and materials

Physical Sciences → Physics and Astronomy → Condensed Matter Physics

Single-Source Precursors to Titanium Nitride Thin Films

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