JOURNAL ARTICLE

Single-Source Precursors to Niobium Nitride and Tantalum Nitride Films

Charles H. WinterKumudini C. JayaratneJames W. Proscia

Year: 1993 Journal:   MRS Proceedings Vol: 327   Publisher: Cambridge University Press
Keywords:
Tantalum Tantalum nitride Materials science Nitride Dichloromethane Niobium Solvent Niobium nitride Benzene Thin film Inorganic chemistry Nanotechnology Organic chemistry Metallurgy Chemistry Layer (electronics)

Metrics

19
Cited By
0.69
FWCI (Field Weighted Citation Impact)
12
Refs
0.62
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Inorganic Chemistry and Materials
Physical Sciences →  Chemistry →  Inorganic Chemistry
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Organometallic Complex Synthesis and Catalysis
Physical Sciences →  Chemistry →  Organic Chemistry
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