Single-Source Precursors to Niobium Nitride and Tantalum Nitride Films

Charles H. Winter; Kumudini C. Jayaratne; James W. Proscia

doi:10.1557/proc-327-103

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Single-Source Precursors to Niobium Nitride and Tantalum Nitride Films

Charles H. Winter Kumudini C. Jayaratne James W. Proscia

Year: 1993 Journal: MRS Proceedings Vol: 327 Publisher: Cambridge University Press

DOI: 10.1557/proc-327-103

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Keywords:

Tantalum Tantalum nitride Materials science Nitride Dichloromethane Niobium Solvent Niobium nitride Benzene Thin film Inorganic chemistry Nanotechnology Organic chemistry Metallurgy Chemistry Layer (electronics)

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Inorganic Chemistry and Materials

Physical Sciences → Chemistry → Inorganic Chemistry

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Organometallic Complex Synthesis and Catalysis

Physical Sciences → Chemistry → Organic Chemistry

Single-Source Precursors to Niobium Nitride and Tantalum Nitride Films

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