Single-Source Precursors to Vanadium Nitride Thin Films

Charles H. Winter; V. Viejo; James W. Proscia

doi:10.1557/proc-327-109

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Single-Source Precursors to Vanadium Nitride Thin Films

Charles H. Winter V. Viejo James W. Proscia

Year: 1993 Journal: MRS Proceedings Vol: 327 Publisher: Cambridge University Press

DOI: 10.1557/proc-327-109

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Keywords:

Vanadium Materials science Vanadium nitride Characterization (materials science) Nitride Chloride Silicon nitride Chemical engineering Inorganic chemistry Silicon Nanotechnology Metallurgy Chemistry

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Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Luminescence Properties of Advanced Materials

Physical Sciences → Materials Science → Materials Chemistry

Ga2O3 and related materials

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Single-Source Precursors to Vanadium Nitride Thin Films

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