JOURNAL ARTICLE

Analysis of small deflection touch mode behavior in capacitive pressure sensors

Giulio FragiacomoThor AnsbækThomas PedersenOle HansenErik Vilain Thomsen

Year: 2010 Journal:   Sensors and Actuators A Physical Vol: 161 (1-2)Pages: 114-119   Publisher: Elsevier BV
Keywords:
Capacitive sensing Deflection (physics) Finite element method Piezoresistive effect Capacitance Acoustics Pressure sensor Electronic engineering Parasitic capacitance Microelectromechanical systems Sensitivity (control systems) Materials science Engineering Electrical engineering Mechanical engineering Optoelectronics Structural engineering Optics Physics

Metrics

50
Cited By
3.10
FWCI (Field Weighted Citation Impact)
19
Refs
0.92
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Advanced Sensor and Energy Harvesting Materials
Physical Sciences →  Engineering →  Biomedical Engineering
Electrical and Thermal Properties of Materials
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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