Analysis of small deflection touch mode behavior in capacitive pressure sensors

Giulio Fragiacomo; Thor Ansbæk; Thomas Pedersen; Ole Hansen; Erik Vilain Thomsen

doi:10.1016/j.sna.2010.04.030

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Analysis of small deflection touch mode behavior in capacitive pressure sensors

Giulio Fragiacomo Thor Ansbæk Thomas Pedersen Ole Hansen Erik Vilain Thomsen

Year: 2010 Journal: Sensors and Actuators A Physical Vol: 161 (1-2)Pages: 114-119 Publisher: Elsevier BV

DOI: 10.1016/j.sna.2010.04.030

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Keywords:

Capacitive sensing Deflection (physics) Finite element method Piezoresistive effect Capacitance Acoustics Pressure sensor Electronic engineering Parasitic capacitance Microelectromechanical systems Sensitivity (control systems) Materials science Engineering Electrical engineering Mechanical engineering Optoelectronics Structural engineering Optics Physics

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Sensor and Energy Harvesting Materials

Physical Sciences → Engineering → Biomedical Engineering

Electrical and Thermal Properties of Materials

Physical Sciences → Engineering → Electrical and Electronic Engineering

Analysis of small deflection touch mode behavior in capacitive pressure sensors

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