JOURNAL ARTICLE

Investigation of defect formation and electronic transport in microcrystalline silicon deposited by hot-wire CVD

Keywords:
Materials science Silicon Substrate (aquarium) Chemical vapor deposition Microcrystalline silicon Phase (matter) Transmission electron microscopy Microcrystalline Epitaxy Analytical Chemistry (journal) Scanning electron microscope Raman spectroscopy Optoelectronics Composite material Optics Crystalline silicon Nanotechnology Chemistry Crystallography

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4
Cited By
0.26
FWCI (Field Weighted Citation Impact)
0
Refs
0.49
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Citation History

Topics

Silicon Nanostructures and Photoluminescence
Physical Sciences →  Materials Science →  Materials Chemistry
Thin-Film Transistor Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Nanowire Synthesis and Applications
Physical Sciences →  Engineering →  Biomedical Engineering
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