JOURNAL ARTICLE

On the properties of AlN thin films grown by low temperature reactive r.f. sputtering

Keywords:
Materials science Sputtering Annealing (glass) Thin film Electrical resistivity and conductivity Dielectric Refractive index Analytical Chemistry (journal) Band gap Mineralogy Composite material Optoelectronics Chemistry Nanotechnology

Metrics

62
Cited By
2.51
FWCI (Field Weighted Citation Impact)
14
Refs
0.88
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Acoustic Wave Resonator Technologies
Physical Sciences →  Engineering →  Biomedical Engineering
GaN-based semiconductor devices and materials
Physical Sciences →  Physics and Astronomy →  Condensed Matter Physics
High voltage insulation and dielectric phenomena
Physical Sciences →  Materials Science →  Materials Chemistry

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