Yttria-stabilized zirconia thin films grown by reactive r.f. magnetron sputtering

H. Tomaszewski; J. Haemers; J. Denul; Nico De Roo; Roger De Gryse

doi:10.1016/s0040-6090(96)08743-3

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Yttria-stabilized zirconia thin films grown by reactive r.f. magnetron sputtering

H. Tomaszewski J. Haemers J. Denul Nico De Roo Roger De Gryse

Year: 1996 Journal: Thin Solid Films Vol: 287 (1-2)Pages: 104-109 Publisher: Elsevier BV

DOI: 10.1016/s0040-6090(96)08743-3

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Keywords:

Cubic zirconia Materials science Sputtering Yttria-stabilized zirconia Substrate (aquarium) Sputter deposition Thin film Crystallite Stoichiometry Argon Microstructure Oxygen Analytical Chemistry (journal) Cavity magnetron Ceramic Mineralogy Composite material Chemistry Metallurgy Nanotechnology

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Phase-change materials and chalcogenides

Physical Sciences → Materials Science → Materials Chemistry

Liquid Crystal Research Advancements

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Chalcogenide Semiconductor Thin Films

Physical Sciences → Engineering → Electrical and Electronic Engineering

Yttria-stabilized zirconia thin films grown by reactive r.f. magnetron sputtering

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