Amorphous Zn3P2 thin films grown by reactive r.f. sputtering

JOURNAL ARTICLE

Year: 1994 Journal: Thin Solid Films Vol: 239 (2)Pages: 205-210 Publisher: Elsevier BV

DOI: 10.1016/0040-6090(94)90852-4

Keywords:

Sputtering Amorphous solid Thin film Materials science Chemical engineering Mineralogy Nanotechnology Chemistry Crystallography Engineering

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