JOURNAL ARTICLE

Sputtering characteristics of diamond and hydrogenated amorphous carbon films by r.f. plasma

Keywords:
Sputtering Carbon film Amorphous solid Hydrogen Analytical Chemistry (journal) Argon Materials science Amorphous carbon Diamond Chemical vapor deposition Diamond-like carbon Carbon fibers Torr Scanning electron microscope Thin film Chemistry Crystallography Nanotechnology Composite material Composite number Organic chemistry

Metrics

10
Cited By
1.82
FWCI (Field Weighted Citation Impact)
14
Refs
0.83
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Topics

Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry
Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
Ion-surface interactions and analysis
Physical Sciences →  Engineering →  Computational Mechanics

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