JOURNAL ARTICLE

Diamond-like amorphous carbon films prepared by r.f. sputtering in argon

J. UllmannG. SchmidtW. Scharff

Year: 1992 Journal:   Thin Solid Films Vol: 214 (1)Pages: 35-43   Publisher: Elsevier BV
Keywords:
Sputtering Argon Materials science Carbon fibers Amorphous solid Yield (engineering) Graphite Substrate (aquarium) Thin film Diamond Amorphous carbon Carbon film Diamond-like carbon Sputter deposition Analytical Chemistry (journal) Optoelectronics Composite material Nanotechnology Chemistry Atomic physics Crystallography Physics

Metrics

14
Cited By
1.97
FWCI (Field Weighted Citation Impact)
21
Refs
0.87
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry
Ion-surface interactions and analysis
Physical Sciences →  Engineering →  Computational Mechanics
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
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