Diamond-like amorphous carbon films prepared by r.f. sputtering in argon

J. Ullmann; G. Schmidt; W. Scharff

doi:10.1016/0040-6090(92)90452-h

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Diamond-like amorphous carbon films prepared by r.f. sputtering in argon

J. Ullmann G. Schmidt W. Scharff

Year: 1992 Journal: Thin Solid Films Vol: 214 (1)Pages: 35-43 Publisher: Elsevier BV

DOI: 10.1016/0040-6090(92)90452-h

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Keywords:

Sputtering Argon Materials science Carbon fibers Amorphous solid Yield (engineering) Graphite Substrate (aquarium) Thin film Diamond Amorphous carbon Carbon film Diamond-like carbon Sputter deposition Analytical Chemistry (journal) Optoelectronics Composite material Nanotechnology Chemistry Atomic physics Crystallography Physics

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Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Ion-surface interactions and analysis

Physical Sciences → Engineering → Computational Mechanics

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Diamond-like amorphous carbon films prepared by r.f. sputtering in argon

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