Diamond-like amorphous carbon films prepared by r.f. sputtering in argon: electron-assisted investigations

J. Ullmann; S. Schulze; J. Erben; W. Grünewald; D. Heger; I. Mühling

doi:10.1016/0040-6090(92)90730-y

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Diamond-like amorphous carbon films prepared by r.f. sputtering in argon: electron-assisted investigations

J. Ullmann S. Schulze J. Erben W. Grünewald D. Heger I. Mühling

Year: 1992 Journal: Thin Solid Films Vol: 219 (1-2)Pages: 109-118 Publisher: Elsevier BV

DOI: 10.1016/0040-6090(92)90730-y

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Keywords:

Amorphous carbon Argon Amorphous solid Electron energy loss spectroscopy Transmission electron microscopy Scanning electron microscope Carbon fibers Carbon film Sputtering Materials science Substrate (aquarium) Analytical Chemistry (journal) Impurity Diamond Diamond-like carbon Thin film Chemistry Nanotechnology Crystallography Composite material Composite number

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Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Force Microscopy Techniques and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Diamond-like amorphous carbon films prepared by r.f. sputtering in argon: electron-assisted investigations

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