BOOK-CHAPTER
Printed thick-film mechanical microsystems (MEMS)
Year: 2012 Elsevier eBooks Pages: 259-277 Publisher: Elsevier BV
Keywords:
Microsystem Surface micromachining Materials science Microelectromechanical systems Ceramic Lead zirconate titanate Silicon Bulk micromachining Piezoelectricity Nanotechnology Optoelectronics Fabrication Composite material Ferroelectricity
Metrics
5
Cited By
0.00
FWCI (Field Weighted Citation Impact)
35
Refs
0.13
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Electrical and Thermal Properties of Materials
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Ferroelectric and Piezoelectric Materials
Physical Sciences → Materials Science → Materials Chemistry
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