JOURNAL ARTICLE

Triaxial MEMS accelerometer with screen printed PZT thick film

C. C. HindrichsenNinia S. AlmindSimon H. BrodersenR. Lou-MøllerK. HansenErik Vilain Thomsen

Year: 2010 Journal:   Journal of Electroceramics Vol: 25 (2-4)Pages: 108-115   Publisher: Springer Science+Business Media
Keywords:
Microelectromechanical systems Materials science Piezoelectricity Finite element method Accelerometer Sensitivity (control systems) Voltage Piezoelectric accelerometer Optoelectronics Acoustics Bandwidth (computing) Actuator Screen printing Silicon PMUT Electronic engineering Composite material Electrical engineering Computer science Structural engineering Engineering

Metrics

42
Cited By
1.50
FWCI (Field Weighted Citation Impact)
21
Refs
0.82
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Acoustic Wave Resonator Technologies
Physical Sciences →  Engineering →  Biomedical Engineering
Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Advanced Fiber Optic Sensors
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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