JOURNAL ARTICLE
Triaxial MEMS accelerometer with screen printed PZT thick film
C. C. HindrichsenNinia S. AlmindSimon H. BrodersenR. Lou-MøllerK. HansenErik Vilain Thomsen
Year: 2010 Journal: Journal of Electroceramics Vol: 25 (2-4)Pages: 108-115 Publisher: Springer Science+Business Media
Keywords:
Microelectromechanical systems Materials science Piezoelectricity Finite element method Accelerometer Sensitivity (control systems) Voltage Piezoelectric accelerometer Optoelectronics Acoustics Bandwidth (computing) Actuator Screen printing Silicon PMUT Electronic engineering Composite material Electrical engineering Computer science Structural engineering Engineering
Metrics
42
Cited By
1.50
FWCI (Field Weighted Citation Impact)
21
Refs
0.82
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Acoustic Wave Resonator Technologies
Physical Sciences → Engineering → Biomedical Engineering
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advanced Fiber Optic Sensors
Physical Sciences → Engineering → Electrical and Electronic Engineering
Related Documents
JOURNAL ARTICLE
MEMS Accelerometer with Screen Printed Piezoelectric Thick Film
C. C. HindrichsenErik Vilain ThomsenR. Lou-MøllerTorsten Bove
Year: 2006 Vol: 12 Pages: 1477-1480
JOURNAL ARTICLE
Process Considerations for Screen-Printed Thick-Film MEMS
Z. StanimirovićI. Stanimirović
Year: 2021 Pages: 169-171
JOURNAL ARTICLE
Monolithic triaxial accelerometer design in thick-film technology
Journal: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Year: 2001 Vol: 4414 Pages: 262-262
BOOK-CHAPTER
Printed thick-film mechanical microsystems (MEMS)
Elsevier eBooks Year: 2012 Pages: 259-277
JOURNAL ARTICLE
Screen printed nanosized ZnO thick film
Bindu KrishnanV. P. N. Nampoori
Journal: Bulletin of Materials Science Year: 2005 Vol: 28 (3)Pages: 239-242