JOURNAL ARTICLE
MEMS Accelerometer with Screen Printed Piezoelectric Thick Film
C. C. HindrichsenErik Vilain ThomsenR. Lou-MøllerTorsten Bove
Year: 2006 Vol: 12 Pages: 1477-1480
Abstract
A bulk-micromachined piezoelectric MEMS accelerometer with screen printed piezoelectric Pb(Zr x Ti 1-x )O 3 (PZT) thick film (TF) as the sensing material has been fabricated and characterized. The accelerometer has a four beam structure with a central seismic mass (3600times3600times500 mum3) and a total chip size of 10times10 mm 2 . The resonance frequency is found to be 17.5 kHz and the sensitivity 4.15 mV/g for a single beam.
Keywords:
Accelerometer Microelectromechanical systems Piezoelectricity Sensitivity (control systems) Materials science Analytical Chemistry (journal) Computer science Optoelectronics Composite material Electronic engineering Engineering Chemistry Organic chemistry
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16
Cited By
1.01
FWCI (Field Weighted Citation Impact)
1
Refs
0.79
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advanced Fiber Optic Sensors
Physical Sciences → Engineering → Electrical and Electronic Engineering
Acoustic Wave Resonator Technologies
Physical Sciences → Engineering → Biomedical Engineering
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