Thick film flow sensor for biological microsystems

Heike Bartsch; Christian Rensch; M. Fischer; Andreas Schober; Martin Hoffmann; Jens Müller

doi:10.1016/j.sna.2010.04.010

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JOURNAL ARTICLE

Thick film flow sensor for biological microsystems

Heike Bartsch Christian Rensch M. Fischer Andreas Schober Martin Hoffmann Jens Müller

Year: 2010 Journal: Sensors and Actuators A Physical Vol: 160 (1-2)Pages: 109-115 Publisher: Elsevier BV

DOI: 10.1016/j.sna.2010.04.010

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Keywords:

Microsystem Thermistor Fluidics Materials science Anemometer Electronics Electronic component Flow control (data) Compatibility (geochemistry) Miniaturization Mechanical engineering Electronic engineering Electrical engineering Nanotechnology Engineering Composite material

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Topics

Electrical and Thermal Properties of Materials

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Sensor Technologies Research

Physical Sciences → Engineering → Biomedical Engineering

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Thick film flow sensor for biological microsystems

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