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High-Resolution TEM Evaluation of InAs/InP Strained Layer Superlattices Grown on (001)InAs Substrates by Atomic Layer Epitaxy

Keywords:
Superlattice Materials science Monolayer Layer (electronics) Epitaxy Substrate (aquarium) Atomic layer epitaxy Transmission electron microscopy Stacking Optoelectronics Crystallography Condensed matter physics Nanotechnology Chemistry

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Semiconductor Quantum Structures and Devices
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Advanced Semiconductor Detectors and Materials
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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