DISSERTATION
Microactuators and their application in micro-opto-electro-mechanical systems (MOEMS)
Keywords:
Nanotechnology Microelectromechanical systems Materials science Engineering Mechanical engineering
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Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advanced Measurement and Metrology Techniques
Physical Sciences → Engineering → Mechanical Engineering
Advanced machining processes and optimization
Physical Sciences → Engineering → Mechanical Engineering
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