InP-based micro-opto-electro-mechanical systems (MOEMS)

Abstract

The potential application of InP and related compound semiconductors for the realisation of novel microsystems is explored. Monolithic integration of optoelectronic devices with micro-electro-mechanica transducers are expected to develop a new and low cost technology for the implementation of specific microsensors and microactuators with a higher sensitivity and a wider range of environmental interaction as compared with other existing MEMS. The InP-based microtechnology has been developed, which includes the design of microsystems, epitaxial growth of heterostructures, selective micromachining, electro-opto-mechanical charactensations.