Micro-Opto-Electro-Mechanical-Systems (MOEMS) in Automotive Applications

Frank Ansorge; J.H. Wolter; H.‐M. Hanisch; H. Reichl

doi:10.1007/978-3-642-18213-6_18

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Micro-Opto-Electro-Mechanical-Systems (MOEMS) in Automotive Applications

Frank Ansorge J.H. Wolter H.‐M. Hanisch H. Reichl

Year: 2002 Pages: 146-156

DOI: 10.1007/978-3-642-18213-6_18

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Keywords:

Mechatronics Automotive industry Reliability (semiconductor) Actuator Engineering Automotive engineering Computer science Mechanical engineering Control engineering Electrical engineering

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Semiconductor Lasers and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

3D IC and TSV technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Micro-Opto-Electro-Mechanical-Systems (MOEMS) in Automotive Applications

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