Application of in Situ Ellipsometry to the Growth of Hydrogenated Amorphous Silicon

R. W. Collins; J. M. Cavese; A. H. Clark

doi:10.1007/978-1-4613-1841-5_49

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Application of in Situ Ellipsometry to the Growth of Hydrogenated Amorphous Silicon

R. W. Collins J. M. Cavese A. H. Clark

Year: 1987 Pages: 447-458

DOI: 10.1007/978-1-4613-1841-5_49

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Keywords:

In situ Amorphous silicon Materials science Ellipsometry Silicon Optoelectronics Nanotechnology Crystalline silicon Chemistry Thin film Organic chemistry

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Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Silicon and Solar Cell Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Silicon Nanostructures and Photoluminescence

Physical Sciences → Materials Science → Materials Chemistry

Application of in Situ Ellipsometry to the Growth of Hydrogenated Amorphous Silicon

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