Infrared Ellipsometry Investigation of Hydrogenated Amorphous Silicon

F. Gaspari; A. Shkrebtii; Tom Tiwald; Andrea Fuchser; Shafiq Muhammad Ahmed; Tome Kosteski; Keith Leong; Nazir Kherani

doi:10.1557/proc-1153-a16-03

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Infrared Ellipsometry Investigation of Hydrogenated Amorphous Silicon

F. Gaspari A. Shkrebtii Tom Tiwald Andrea Fuchser Shafiq Muhammad Ahmed Tome Kosteski Keith Leong Nazir Kherani

Year: 2009 Journal: MRS Proceedings Vol: 1153 Publisher: Cambridge University Press

DOI: 10.1557/proc-1153-a16-03

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Keywords:

Materials science Ellipsometry Fourier transform infrared spectroscopy Analytical Chemistry (journal) Infrared Infrared spectroscopy Silicon Amorphous silicon Amorphous solid Raman spectroscopy Thin film Optoelectronics Optics Crystalline silicon Nanotechnology Crystallography Chemistry Organic chemistry

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Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Silicon Nanostructures and Photoluminescence

Physical Sciences → Materials Science → Materials Chemistry

Silicon and Solar Cell Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Infrared Ellipsometry Investigation of Hydrogenated Amorphous Silicon

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