Selective and Nonplanar Metal Organic Vapour Phase Epitaxy

Roel Baets; Piet Demeester; Peter Van Daele

doi:10.1007/978-1-4899-2522-0_25

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Selective and Nonplanar Metal Organic Vapour Phase Epitaxy

Roel Baets Piet Demeester Peter Van Daele

Year: 1989 NATO ASI series. Series B : Physics Pages: 227-236 Publisher: Springer Nature

DOI: 10.1007/978-1-4899-2522-0_25

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Keywords:

Epitaxy Fabrication Substrate (aquarium) Materials science Etching (microfabrication) Optoelectronics Monocrystalline silicon Nanotechnology Deposition (geology) Silicon

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Semiconductor Lasers and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Optical Coatings and Gratings

Physical Sciences → Materials Science → Surfaces, Coatings and Films

Copper Interconnects and Reliability

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Selective and Nonplanar Metal Organic Vapour Phase Epitaxy

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